IEST RP-CC016.2 PDF

IEST RP-CC016.2 PDF

$114.00

The Rate of Deposition of Nonvolatile Residue in Cleanrooms

Published by Publication Date Number of Pages
IEST 04/01/2006 20
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IEST RP-CC016.2 – The Rate of Deposition of Nonvolatile Residue in Cleanrooms

IEST RP-CC016.2 provides a uniform method and basis for determining the rate of deposition of nonvolatile residue (NVR) on surfaces in cleanrooms. In the design of the heating, ventilating, and air conditioning system, the selection of suitable filters, and the selection of materials used in the construction of the cleanroom, the requirements for the rate of deposition of NVR should be specified by the user. Designers of cleanrooms should consider the maximum deposition rates suggested by This RP when the deposition of NVR can affect the performance of products.

Product Details

Published:
04/01/2006
ISBN(s):
9781877862281
Number of Pages:
20
File Size:
1 file , 680 KB
Note:
This product is unavailable in Russia, Ukraine, Belarus

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