IEST G-CC035.1 – Design Considerations for AMC Filtration Systems in Cleanrooms
This Guideline provides information for designing filtration systems to eliminate trace amounts (less than 1 ppmv) of airborne molecular contamination (AMC) from the air supplied to cleanrooms and other controlled environments. The document covers applications, potential points of use, filtration methods, construction materials, performance comparison, and follow-up assessment. Also discussed are secondary impacts of the filters on the HVAC system and exterior impacts on the filtration system.
Product Details
Published:
07/01/2009
ISBN(s):
9780978786885
Number of Pages:
24
File Size:
1 file , 600 KB
Note:
This product is unavailable in Russia, Ukraine, Belarus
