IEC 62047-34 Ed. 1.0 en – Semiconductor devices – Micro-electromechanical devices – Part 34: Test methods for MEMS piezoresistive pressure-sensitive device on wafer
IEC 62047-34:2019 (E) describes test conditions and test methods of electric character, static performances and thermal performances for MEMS pressure-sensitive devices. This document applies to test for both open and closed loop piezoresistive MEMS pressure devices on wafer.
Product Details
Edition:
1.0
Published:
04/05/2019
Number of Pages:
16
File Size:
1 file , 1.2 MB
Note:
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