Semiconductor devices – Part 14-11: Semiconductor sensors – Test method of surface acoustic wave-based integrated sensors for measuring ultraviolet, illumination and temperature

Published by	Publication Date	Number of Pages
IEC	03/03/2021	21

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IEC 60747-14-11 Ed. 1.0 en – Semiconductor devices – Part 14-11: Semiconductor sensors – Test method of surface acoustic wave-based integrated sensors for measuring ultraviolet, illumination and temperature

IEC 60747-14-11:2021(E) defines the terms, definitions, configuration, and test methods can be used to evaluate and determine the performance characteristics of surface acoustic wave-based semiconductor sensors integrated with ultraviolet, illuminance, and temperature sensors. The measurement methods are for DC characteristics and RF characteristics, and the measurement method for RF characteristics includes a direct mode and differential amplifier mode based on feedback oscillation. This document excludes devices dealt with by TC 49: piezoelectric, dielectric and electrostatic devices and associated materials for frequency control, selection and detection.