Semiconductor devices – Micro-electromechanical devices – Part 21: Test method for Poisson's ratio of thin film MEMS materials

Published by	Publication Date	Number of Pages
IEC	06/19/2014	26

Category: IEC

Description

IEC 62047-21 Ed. 1.0 b – Semiconductor devices – Micro-electromechanical devices – Part 21: Test method for Poisson's ratio of thin film MEMS materials

IEC 62047-21:2014 specifies the determination of Poisson’s ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 µm.