Semiconductor devices – Micro-electromechanical devices – Part 28: Performance testing method of vibration-driven MEMS electret energy harvesting devices

Published by	Publication Date	Number of Pages
IEC	01/20/2017	17

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Category: IEC

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IEC 62047-28 Ed. 1.0 en – Semiconductor devices – Micro-electromechanical devices – Part 28: Performance testing method of vibration-driven MEMS electret energy harvesting devices

IEC 62047-28:2017(E) specifies terms and definitions, and a performance testing method of vibration driven MEMS electret energy harvesting devices to determine the characteristic parameters for consumer, industry or any application.
This document applies to vibration driven electret energy harvesting devices whose electrodes with a gap below 1 000 μm are covered by dielectric material with trapped charges and are fabricated by MEMS processes such as etching, photolithography or deposition.