Semiconductor devices – Micro-electromechanical devices – Part 34: Test methods for MEMS piezoresistive pressure-sensitive device on wafer

Published by	Publication Date	Number of Pages
IEC	04/05/2019	16

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Category: IEC

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IEC 62047-34 Ed. 1.0 en – Semiconductor devices – Micro-electromechanical devices – Part 34: Test methods for MEMS piezoresistive pressure-sensitive device on wafer

IEC 62047-34:2019 (E) describes test conditions and test methods of electric character, static performances and thermal performances for MEMS pressure-sensitive devices. This document applies to test for both open and closed loop piezoresistive MEMS pressure devices on wafer.