Standard Test Method for Strain Gradient Measurements of Thin, Reflecting Films Using an Optical Interferometer

Published by	Publication Date	Number of Pages
ASTM	05/01/2018	21

Category: ASTM

Description

ASTM E2246 – Standard Test Method for Strain Gradient Measurements of Thin, Reflecting Films Using an Optical Interferometer

1.1 This test method covers a procedure for measuring the strain gradient in thin, reflecting films. It applies only to films, such as found in microelectromechanical systems (MEMS) materials, which can be imaged using an optical interferometer, also called an interferometric microscope. Measurements from cantilevers that are touching the underlying layer are not accepted.